Description: Motorized XYZθxθyθz, Six-Axis Aligner
| Part Number | 8095 |
|---|---|
| Category | Motion |
| Manufacturer | Newport |
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The Newport 8095 is a sophisticated Motorized XYZθxθyθz, Six-Axis Aligner designed to enhance the functionality of compatible kinematic stages by introducing axis motorization capabilities. This aligner incorporates precision Picomotor actuators for each stage, enabling remote, high-resolution adjustments of multiple combinations involving θx, θy, θz, X, Y, and Z axes. The 8095 aligner is particularly well-suited for semiconductor-wafer alignment applications. Additionally, it is equipped with 1/4-20 tapped holes, strategically positioned for optimized mounting of the aligner.
| Axes of Travel | X, Y, Z, θx, θy, θz |
| Mechanism | Kinematic |
| Travel Range | 3 mm |
| Angular Range | 4° |
| Load Capcity | 13 N |
| Minimum Incremental Motion | <30 nm |
| Connector Type | 4-Pin Connectors (6) |
| Operating Temperature | 10 to 40°C |