Description: Integrated XY Linear Stage
| Part Number | ONE-XY100 |
|---|---|
| Category | Motion |
| Manufacturer | Newport |
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The ONE-XY100 by Newport is an advanced Integrated XY Linear Stage that has been meticulously engineered to enhance system stiffness, particularly for dynamic applications, while eliminating the need for separate X and Y stage integration. The stage offers a substantial 90 mm travel range, ensuring precise orthogonality alignment between both axes. The key to the ONE-XY100’s exceptional performance are the incorporation of robust components, such as crossed roller bearings and an iron-free motor driver.
Intended for precision industrial applications, including laser micro processing, metrology, microelectronics test and assembly, and semiconductor wafer inspection, the ONE-XY100 consistently delivers superior results. Because of its precision grinding and bearings, the stage achieves micron-level straightness and flatness, crucial for demanding tasks. The ironless linear motor employed in the ONE-XY100 brings several advantages. Notably, it enables higher speed, system responsiveness, and acceleration, all while avoiding issues associated with motor brush or drive screw wear, leading to significantly reduced heat generation. The motor's non-cogging feature further ensures excellent stability, contributing to heightened reliability and superior throughput.
One of the ONE-XY100's distinct design aspects is its 3-plate configuration, which enables movement in both the X and Y directions, all within a low-profile setup relative to stacked stages. The inclusion of a monolithic, aluminum middle plate sets it apart from traditional interfaces between individual linear stages, resulting in enhanced stiffness and performance. For precise position feedback, the ONE-XY100 integrates a highly repeatable linear scale mounted internally. Additionally, absolute home position and limit signals are incorporated to optimize repeatability and reliability while streamlining the design with fewer electronics and mechanical parts.
| Travel Range | 90 mm x 90 mm |
| Minimum Incremental Motion | 0.05 µm |
| Bi-Directional Repeatability, Typical | ±0.040 (±0.080) µm |
| Accuracy, Typical | ±0.5 (±2.0) µm |
| Roll | 58 µrad |
| Maximum Acceleration | 0.3 G |
| Maximum Load Capacity | 120 N |
| Weight | 12.8 lbs (5.8 kg) |