XML350 In Stock

The Newport XML350 is an Ultra-Performance Linear Motor Stage that delivers exceptional motion accuracy of 1 nm, covering a travel range of 250 mm. This stage showcases remarkable dynamic performance capabilities and is designed to ensure reliable and repeatable motion. Its compact form factor and precision-engineered components minimize motor heating and wear, making it a highly dependable solution. The XML350 finds its optimal application in various fields, including ultra-precision assembly, sensor test and calibration, semiconductor wafer processing, laser matching, laser marking, laser cutting, laser nano-patterning, and other scaling applications that demand swift responses.

The XML350 can be arranged in a 2-axis XY configuration, controlled by a XPS controller. This arrangement enables ultra-high precision, smooth, and intricate motion that, with a galvo scanner, can be synchronized. For applications like precision assembly, direct laser lithography, sensor test/calibration, and focusing, two XML350 stages can be combined with an XMS-V vertical stage, creating a 3-axis XYZ configuration of motion. This stage is capable of consistently achieving 1 nm Minimum Incremental Motion (MIM) under controlled environmental conditions. The T-shaped carriage of this stage provides an ideal solution for precision XY assemblies without compromising preload. Moreover, it demonstrates enhanced robustness and tolerance to less-than-ideal mounting conditions.

Unlike screw-driven stages, the XML350 utilizes a ironless linear motor that is center-driven for propulsion. This frictionless direct drive system eliminates issues like backlash, hysteresis, wind-up, and stiction, ensuring superior motion performance. The linear motor drive also offers advantages such as higher system responsiveness, acceleration, and speed, while eliminating wear to drive screws and motor brushes. The stage's ironless motor coil guarantees zero cogging, resulting in velocity control that is ultra-smooth and higher efficiency in comparison with other stage designs, which also translates to lower heat generation. Additionally, to optimize thermal management and its impact on stage performance, the XML350 features a magnetic track length decoupling away from the stage carriage.

The XML350 incorporates matched pairs of anti-creep crossed roller bearings, which play a crucial role in precise trajectory control. These bearings lack recirculating elements, resulting in exceptionally ripple-free motion, well-suited for demanding inspection and scanning systems. The bearings have geared retainers that prevent migration of the bearing cage, a potential concern with other linear bearing products. Precision position feedback is provided by a high accuracy Heidenhain Linear Scale, strategically mounted at the center of the stage to minimize the influence of temperature fluctuations on stage accuracy and repeatability. Encoder signals are further interpolated by a compatible XPS motion controller, offering sub-nanometer resolution and less than 10 nm noise for position sensitivity and stability.