ZVR-Z466B In Stock

The ZVR-Z466B by Newport is an Integrated Wafer Positioning Stage specifically designed to provide precise rotation and elevation for wafer chucks. This stage combines Z and Theta positioning, allowing for accurate movement along multiple axes. The unique three-point design of the ZVR-Z466B is strategically spaced at 120-degree intervals around the outer circumference of the stage. This configuration supports and drives the payload in a manner that proves advantageous in applications involving unbalanced loading. In scenarios where vertical forces are applied to locations along the check's outer edges, the off-center loads can lead to angular deviations. However, this stage minimizes and contains these deviations during vertical motion, resulting in improved stability and accuracy.

The ZVR-Z466B can accommodate lines, cables, and other utilities with a 50 mm clear aperture that moves through the center of the stage. Moreover, users can easily set an upper limit of vertical travel, offering a 4 mm adjustment range to cater to specific requirements. For optimal performance and compatibility, the stage can be paired with a compatible controller. It is also ESP compatible, allowing users to leverage smart-stage features when used in conjunction with a connected controller. Each axis of the stage comes with a shielded, 3-meter cable equipped with a 25-pin sub-D connector, enabling direct connection to a compatible motion controller, simplifying the setup process. Notably, the ZVR-Z466B boasts a high natural frequency and low mass, making it ideal for rapid step-and-settle applications, where quick and precise movements are crucial.